Design concept
The realization of the microscopic optical system
is impossible(coaxial, high / low system sharing),
providing high resolution optics.
Applicability
Excellent field high efficiency and high quality seamless
optical system for semiconductor inspection and field
equipment and high reflective surface; for example:
wafer, film ... and so on, providing high resolution and
high contrast images.
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Mirror tube (top)
Auxiliary mirror (bottom)
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focal length (mm)
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camera
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1 Times (mm)
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2 Times (mm)
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None
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92 mm
(Vision)
|
Optical multiple
|
0.7x ~ 4.5x
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1.40x ~ 9.00x
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|
½” CCD
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11.42 ~ 1.77
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5.71 ~ 0.89
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1/3" CCD
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8.58 ~ 1.33
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4.29 ~ 0.67
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0.5 Times
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175 mm
(Vision)
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Optical multiple
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0.35x ~ 2.25x
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0.7x ~ 4.5x
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½” CCD
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22.85 ~ 3.56
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11.42 ~ 1.77
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||
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1/3" CCD
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17.16 ~ 2.67
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8.58 ~ 1.33
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2.0 Times
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36 mm
(Vision)
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Optical multiple
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1.4x ~ 9.0x
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2.80x ~ 18.00x
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½” CCD
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5.71 ~ 0.89
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2.86 ~ 0.44
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||
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1/3" CCD
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4.29 ~ 0.67
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2.15 ~ 0.33
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||
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Coaxial light source high APO long focal length optical lens
|
||||
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10 Times
NA 0.28
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33 mm
(Vision)
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Optical multiple
|
3.48x ~ 22.86x
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6.96x ~ 45.72x
|
|
½” CCD
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2.30 ~ 0.35
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1.15 ~ 0.17
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||
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1/3" CCD
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1.72 ~ 0.26
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0.86~ 0.13
|
||
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20 Times
NA 0.42
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20 mm
(Vision)
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Optical multiple
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6.96x ~ 45.72x
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13.92x ~ 91.40x
|
|
½” CCD
|
1.15 ~ 0.17
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0.57 ~ 0.09
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||
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1/3" CCD
|
0.86 ~ 0.13
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0.43 ~ 0.07
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||
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50 Times
NA 0.55
|
13 mm
(Vision)
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Optical multiple
|
17.4x ~ 114.3x
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34.8x ~ 228.6x
|
|
½” CCD
|
0.46 ~ 0.07
|
0.23 ~ 0.04
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||
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1/3" CCD
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0.34 ~ 0.05
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0.17 ~ 0.03
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